self-aligned double patterning

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SAMP series finishes with SAMP cut mask decomposition techniques

September 9, 2020

By David Abercrombie and Rehab Kotb Ali – Mentor, A Siemens Business We’ve been writing about self-aligned multi-patterning (SAMP) topics…

By Design With Calibre
2 MIN READ
Fill/Cut Self-Aligned Double-Patterning

Fill/Cut Self-Aligned Double-Patterning

November 28, 2016

By David Abercrombie, Rehab Ali, Ahmed Hamed-Fatehy, and Shetha Nolke How the SID-SADP process affects your design decisions –

By Design With Calibre
11 MIN READ
Self-Aligned Double Patterning, Part Deux

Self-Aligned Double Patterning, Part Deux

March 24, 2015

By David Abercrombie, Mentor Graphics Part 2 of a walk-through of the SADP process.  

By Design With Calibre
6 MIN READ
A Look Behind the Mask of Multi-Patterning

A Look Behind the Mask of Multi-Patterning

January 28, 2015

By Michael White, Mentor Graphics An overview to the mystery of Multi-Patterning

By Design With Calibre
9 MIN READ